专利名称：DEVICE FOR PRODUCING EXCITED/IONIZED
PARTICLES IN A PLASMA
发明人：STEINHARDT, HEINZ,MATHUNI,
JOSEF,GSCHWANDTNER, ALEXANDER
申请号：EP99947488.5申请日：19991011公开号：EP1040506A1公开日：20001004
摘要：The invention relates to a device for producing excited and/or ionized particlesin a plasma, comprising a generator for generating an electromagnetic wave and at leastone plasma zone in which the excited and/or ionized particles are formed by theelectromagnetic wave. The inventive device is characterized in that the plasma zone isformed in the interior of a coaxial conductor for the electromagnetic wave.
申请人：R 3 T GMBH RAPID REACTIVE RADICALS TECHNOLOGY
地址：Elsenheimerstrasse 18 80687 München DE
国籍：DE
代理机构：Lang, Friedrich
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