Mini-environment control system and method

专利名称：Mini-environment control system and

method

发明人：Roland Bernard,Eric Chevalier申请号：US09729779申请日：20001206

公开号：US20010003572A1公开日：20010614

摘要：A mini-environment control device includes an individual enclosure to contain asample and to isolate it from the external environment. An array of micropumps attachedto the individual enclosure generates and maintains a controlled vacuum in the individualenclosure. Transfer means introduce the sample into the individual enclosure and extractit therefrom. The micropumps of the array of micropumps can be of a type employingthe thermal transpiration effect. Temperature and pressure microsensors and a gasanalyzer enable the operation of the array of micropumps to be controlled by anonboard microcomputer. The atmosphere surrounding a sample is therefore controlled.

申请人：BERNARD ROLAND,CHEVALIER ERIC

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