专利名称:Charged particle radiation apparatus发明人:Daisuke Mutou,Shuichi Nakagawa,Masaki
Mizuochi,Toshihiko Shimizu,HirofumiMotoshiromizu,Eisuke Kamide
申请号:US15251040申请日:20160830公开号:US09734983B2公开日:20170815
专利附图:
摘要:To provide a charged particle radiation apparatus including a soundproof coverthat highly realizes both suppression of image defects due to a specific frequency and
improvement in quake resistance. A charged particle radiation apparatus including a box-shaped soundproof cover having a plurality of wall surfaces, the soundproof coverincluding a plurality of columnar bodies forming a frame of the box shape body and abox-shaped acoustic energy absorbing structure provided in a connecting part of theplurality of columnar bodies and attached to support at least the two columnar bodies, isproposed.
申请人:Hitachi High-Technologies Corporation
地址:Minato-ku, Tokyo JP
国籍:JP
代理机构:Crowell & Moring LLP
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