专利名称:Method of forming a reactive material and
article formed thereby
发明人:Douglas Ray Sparks申请号:US10338351申请日:20030107公开号:US06923625B2公开日:20050802
专利附图:
摘要:A method for preventing contamination, oxidation and gas absorption ofreactive materials, and articles formed thereby. The method generally entails depositinga first layer of a reactive material and a second layer of a substantially nonreactive
material so that the second layer protects the first layer from a surrounding atmosphere.For example, the first and second layers may be deposited to form a film on a surfacewithin a chamber that is desired to be maintained in a vacuum during use of the article.The second layer is sufficiently thin such that appropriately heating the first and secondlayers causes the reactive material of the first layer to become interdiffused with thenonreactive material of the second layer, to the extent that at least a portion of thereactive material is able to react and getter gases from the surrounding atmosphere.
申请人:Douglas Ray Sparks
地址:Whitmore Lake MI US
国籍:US
代理机构:Hartman & Hartman
代理人:Gary M. Hartman,Domenica N.S. Hartman
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