专利名称：INCREASING THE GAS EFFICIENCY FOR AN
ELECTROSTATIC CHUCK
发明人：VIJAY D. PARKHE申请号：US14529985申请日：20141031
公开号：US20160079105A1公开日：20160317
专利附图：
摘要：A gas is received through an inlet. A portion of the gas is supplied to anelectrostatic chuck. A portion of the gas is re-circulated through a compressor. Apressure of the second portion of the gas is increased. The second portion of the gas is
stored in a gas storage.
申请人：VIJAY D. PARKHE
地址：San Jose CA US
国籍：US
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