专利名称：METHOD FOR PROVIDING ELECTRICAL
ANTIFUSE INCLUDING PHASE CHANGEMATERIAL
发明人：Chih-Chao Yang申请号：US15843686申请日：20171215
公开号：US20180114754A1公开日：20180426
专利附图：
摘要：An antifuse structure including a first electrode that is present in at a base ofthe opening in the dielectric material. The antifuse structure further includes an antifuse
material layer comprising a phase change material alloy of tantalum and nitrogen. A firstsurface of the antifuse material layer is present in direct contact with the first electrode.A second electrode is present in direct contact with a second surface of the antifusematerial layer that is opposite the first surface of the antifuse material layer.
申请人：INTERNATIONAL BUSINESS MACHINES CORPORATION
地址：Armonk NY US
国籍：US
更多信息请下载全文后查看
因篇幅问题不能全部显示，请点此查看更多更全内容