VACUUM TREATMENT UNIT AND VACUUM TREATMENT PROCESS

专利名称：VACUUM TREATMENT UNIT AND VACUUM

TREATMENT PROCESS

发明人：RAMM, Jürgen,WIDRIG, Beno,KASEMANN,

Stephan,PIMENTA, Marcelo,

Dornelles,MASSLER, Orlaw,HANSELMANN,Barbara

申请号：EP087355.0申请日：20080422公开号：EP21439B1公开日：20170614

摘要：Vacuum treatment installation or vacuum treatment method for carrying out aplasma method, wherein the treatment is carried out in a vacuum chamber, in which aredisposed a device for generating an electric low voltage arc discharge (NVBE) comprisedof a cathode and an anode electrically interconnectable with the cathode via an arcgenerator, and a workpiece carrier electrically interconnectable with a bias generator forreceiving and moving workpieces, as well as at least one feed for inert and/or reactivegas. At least a portion of the surface of the anode is therein fabricated of graphite and isoperated at high temperature.

申请人：Oerlikon Surface Solutions AG, Pfäffikon,OERLIKON SURFACE SOLUTIONS AGPFÄFFIKON,OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON

地址：CH

国籍：CH

代理机构：Troesch Scheidegger Werner AG

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