AIRFLOW SENSOR

专利名称：AIRFLOW SENSOR

发明人：NAGATOMO, Noriaki,INABA, Hitoshi申请号：EP13862045.5申请日：20131121公开号：EP2933642A1公开日：20151021

专利附图：

摘要：Provided is a gas flow sensor that includes a heat-sensitive element formeasurement disposed inside a duct through which a gas to be measured flows and asupport mechanism for supporting the heat-sensitive element for measurement insidethe duct. The heat-sensitive element for measurement includes an insulating film; a thin

film thermistor portion formed on the surface of the insulating film with a thermistormaterial; a pair of comb electrodes which have a plurality of comb portions and arepattern-formed on the thin film thermistor portion using a metal so as to face eachother; and a pair of pattern electrodes which are pattern-formed on the surface of theinsulating film and are connected to the pair of comb electrodes. The support mechanismis disposed such that the planar direction of the insulating film is parallel to the directionof gas flow in the duct.

申请人：Mitsubishi Materials Corporation

地址：3-2, Otemachi 1-chome Chiyoda-ku Tokyo 100-8117 JP

国籍：JP

代理机构：Hoffmann Eitle

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