Zinc oxide thin film, transparent conductive film

专利名称：Zinc oxide thin film, transparent conductive

film and display device using the same

发明人：Yasuo Imanishi,Etsuko Nishimura申请号：US12190617申请日：20080813公开号：US08137594B2公开日：20120320

专利附图：

摘要：A zinc oxide thin film having desired crystallinity is fabricated. The presentinvention provides a zinc oxide thin film which laminated on a substrate, and which is acrystalline thin film of a wurtzite form. The c-axis of the crystalline thin film is oriented in

a direction substantially perpendicular to the substrate. A zinc surface of being one polarsurface of the crystalline thin film in the c-axis direction is formed in the uppermost layer.In addition, the invention also provides a zinc oxide thin film which is laminated on asubstrate, and which is a crystalline thin film of a wurtzite form. The zinc oxide thin film isformed on a metal thin film layer by a thin film fabricating technique.

申请人：Yasuo Imanishi,Etsuko Nishimura

地址：Hitachi JP,Hitachiota JP

国籍：JP,JP

代理机构：Antonelli, Terry, Stout & Kraus, LLP.

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