Insulating arrangement for optical insulation of i

专利名称：Insulating arrangement for optical insulation

of integrated components and the methodof manufacture

发明人：Richard Matz,Jutta Zirrgiebel申请号：US07/302480申请日：190127公开号：US04929515A公开日：19900529

摘要：An isolating arrangement for isolating a portion of a substrate from theremaining portions of the substrate, characterized by the arrangement comprising a pairof obliquely extending slots which merge with each other in the interior of the substrateto isolate a portion or region of the substrate from the remaining portion, except at leastone end of the portion extending between the slots. The slots are preferably formed bya laser-induced, wet-chemical etching and, subsequent to forming the slots, they can befilled with a material, such as metal or a ternary absorber material, to increase theisolation of the substrate region or portion.

申请人：SIEMENS AKTIENGESELLSCHAFT

代理机构：Hill, Van Santen, Steadman & Simpson

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