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Gas panel

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专利名称:Gas panel

发明人:Redemann, Eric J,Vu, Kim N申请号:EP06004376.7申请日:19981028公开号:EP1683994B1公开日:20080130

摘要:A manifold system for enabling a distribution of fluids comprising a plurality ofindividual manifold blocks (1600), each manifold block having a single fluid passagewaywith an entrance port (1634) and an exit port (1636) accessing only a common surface;and means (1950-1956) for removably interlocking a pair of adjacent manifold blocks toeach other to operatively permit their respective fluid passageways to be positioned forinterconnection.

申请人:CELERITY INC

地址:US

国籍:US

代理机构:Waller, Stephen

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