专利名称：Inertia sensor and method of fabricating the
same
发明人：Sakurai, Kohei,Komachiya,
Masahiro,Matsumoto, Masahiro,Suzuki,Seikou
申请号：EP99123185.3申请日：19991124公开号：EP1004882B1公开日：20080416
摘要：A sensor device (1) has a sensing layer (A) and an auxiliary layer (B) for
supporting the sensing layer, the two layers being superposed on each other in a laminarform. The sensing layer has a vibratory body (11, 13) displaceable in a direction parallel toa junction surface between the two layers. The auxiliary layer (B) is affixed to the sensinglayer (A) and a recess or through-hole (10) of a larger area than that of the vibratorybody is formed in the auxiliary layer at a part thereof confronting the vibratory body.
申请人：HITACHI LTD
地址：JP
国籍：JP
代理机构：Beetz & Partner
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