专利名称：AN ANTIREFLECTIVE COATING
COMPOSITION COMPRISING FUSEDAROMATIC RINGS
发明人：HOULIHAN, Francis,ABDALLAH,
David,RAHMAN, M., Dalil,MCKENZIE,
Douglas,ZHANG, Ruzhi,TIMKO, Allen, G.,KIM,Wookyu,LU, Ping-Hung
申请号：EP08751011.1申请日：20080520公开号：EP2158279A2公开日：20100303
摘要：The present invention relates to an organic spin coatable anti reflective coatingcomposition comprising a polymer comprising at least one unit with 3 or more fusedaromatic rings in the backbone of the polymer and at least one unit with an aliphaticmoiety in the backbone of the polymer. The invention further relates to a process forimaging the present composition.
申请人：AZ Electronic Materials USA Corp.
地址：70 Meister Avenue Somerville, New Jersey 08876 US
国籍：US
代理机构：Rippel, Hans Christoph
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