专利名称：SILICONE COATING COMPOSITION发明人：WU, Hengpeng,KIM, Wookyu,ZHUANG,
Hong,LU, PingHung,NEISSER,
Mark,ABDALLAH, David,ZHANG, Ruzhi
申请号：EP08709863.8申请日：20080215公开号：EP2121857A1公开日：20091125
摘要：The present invention relates to a composition comprising: (a) a polymer havingat least one repeating unit of formula (I), where R1 is a non-hydrolysable group and n isan integer ranging from 1 to 3; and (b) a crosslinking catalyst. The composition is useful informing low k dielectric constant materials and as well as hard mask and underlayermaterials with anti-reflective properties for the photolithography industry.
申请人：AZ Electronic Materials USA Corp.
地址：70 Meister Avenue Somerville, NJ 08876 US
国籍：US
代理机构：Isenbruck, Günter
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